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Substrate Heating °C max. 300 - Substrate Carrier mm 2 x 1140 Capacity with Dome- 66mm pcs 2 x 194 - 72mm pcs 2 x 162 - 75mm pcs 2 x 150 - 80mm pcs 2 x 133 - Visor shields large pcs - - Visor shields small pcs - Capacity with Flip Over- 66mm pcs - - 72mm pcs - - 75mm pcs - - 80mm pcs - Pump System- Rotary (double stage) m3/h 2 x 275 - Roots m3/h 2 x 2600 - Meissner Trap l/s 2 x 50000 - Diffusion/Turbo l/s 2x 20000/2x5700 - Baffle type Cryo - Time to Vac. to 1x10–6mbar min - Components- Polycold type 2 x CC11S - IB Gun (optional) type 2 x MARK II - Glow Discharge (optional) V/mA 2 x 1500 / 250 - Thermal Evaporator No. 2x2 - Quartz Thickness
Monitoring Heads No. 2x2 or 6 - EB Gun (270°) kW 2 x 15 - Planar Magnetron kW -
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